SiC coatings grown by liquid injection chemical vapor deposition using single source metal-organic precursors

نویسندگان

  • Guilhaume Boisselier
  • Francis Maury
  • Frédéric Schuster
  • G. Boisselier
  • F. Maury
  • F. Schuster
چکیده

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تاریخ انتشار 2017